Ceramic pressure sensor based on tantalum thin film
- 15 April 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 42 (1-3) , 435-438
- https://doi.org/10.1016/0924-4247(94)80028-6
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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