Quantitative Auger electron spectroscopy in thin film depth profiling

This publication has 26 references indexed in Scilit:

• High resolution digital Auger database of true spectra for Auger electron spectroscopy intensities
  Journal of Vacuum Science & Technology A, 1996
• Atomic mixing, surface roughness and information depth in high‐resolution AES depth profiling of a GaAs/AlAs superlattice structure
  Surface and Interface Analysis, 1994
• Formalism and parameters for quantitative surface analysis by Auger electron spectroscopy and x‐ray photoelectron spectroscopy
  Surface and Interface Analysis, 1993
• Quantitative Auger electron analysis of homogeneous binary alloys of Cr, Fe and Ni
  Vacuum, 1992
• Compositional depth profiling by sputtering
  Progress in Surface Science, 1991
• Calculations of electron inelastic mean free paths. III. Data for 15 inorganic compounds over the 50–2000 eV range
  Surface and Interface Analysis, 1991
• Quantification of preferential sputtering and contamination overlayer effects in AES sputter profiling
  Surface and Interface Analysis, 1984
• Quantitative Analysis by Auger Electron Spectroscopy
  Japanese Journal of Applied Physics, 1983
• Quantitative evaluation of AES-depth profiles of thin anodic oxide films (Ta2O5/Ta, Nb2O5/Nb)
  Surface and Interface Analysis, 1983
• Effects of enhanced diffusion on preferred sputtering of homogeneous alloy surfaces
  Surface Science, 1978