Atomic mixing, surface roughness and information depth in high‐resolution AES depth profiling of a GaAs/AlAs superlattice structure
- 1 September 1994
- journal article
- research article
- Published by Wiley in Surface and Interface Analysis
- Vol. 21 (9) , 673-678
- https://doi.org/10.1002/sia.740210912
Abstract
No abstract availableKeywords
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