Detection of particulates in a rf plasma by laser evaporation and subsequent discharge formation
- 15 August 1993
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 74 (4) , 2959-2961
- https://doi.org/10.1063/1.354603
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
- Plasma particulate contamination control. I. Transport and process effectsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Rastered laser light scattering studies during plasma processing: Particle contamination trapping phenomenaJournal of Vacuum Science & Technology A, 1991
- Particle generation and behavior in a silane-argon low-pressure discharge under continuous or pulsed radio-frequency excitationJournal of Applied Physics, 1991
- Time-resolved emission from laser-ablated uraniumSpectrochimica Acta Part B: Atomic Spectroscopy, 1991
- I n s i t u laser diagnostic studies of plasma-generated particulate contaminationJournal of Vacuum Science & Technology A, 1989
- Particle densities in radio-frequency discharges of silaneThe Journal of Physical Chemistry, 1988
- Particle Distributions and Laser-Particle Interactions in an RF Discharge of SilaneIEEE Transactions on Plasma Science, 1986