Measuring refractive index and thickness of thin films: a new technique
- 15 October 1983
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 22 (20) , 3177-3181
- https://doi.org/10.1364/ao.22.003177
Abstract
Properties of a leaky quasi-waveguide formed by a thin film of refractive index smaller than the substrate are described. By exciting these leaky waves through the substrate, we have demonstrated a convenient and accurate method of measuring both the refractive index and thickness of thin films. Experimental results are given for polystyrene, with a demonstrated accuracy comparable with both that of prism coupling into a waveguiding film and with ellipsometry.Keywords
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