Growth kinetics of Pd2Si from evaporated and sputter-deposited films

This publication has 11 references indexed in Scilit:

• Ion-beam-induced formation of the PdSi silicide
  Applied Physics Letters, 1979
• Electrical characteristics of palladium silicide
  Solid-State Electronics, 1978
• Effect of substrate temperature on the microstructure of thin-film silicide
  Applied Physics Letters, 1977
• Kinetics and mechanism of platinum silicide formation on silicon
  Applied Physics Letters, 1974
• An Investigation of the Structure of Pd[sub 2]Si Formed on Si
  Journal of the Electrochemical Society, 1974
• Formation kinetics and structure of Pd2Si films on Si
  Solid-State Electronics, 1973
• The growth and transformation of Pd2Si on (111), (110) and (100) Si
  Thin Solid Films, 1973
• The specific contact resistance of Pd2Si contacts on n- and p-Si
  Solid-State Electronics, 1973
• Alloying of thin palladium films with single crystal and amorphous silicon
  Physica Status Solidi (a), 1973
• Structure and electrical characteristics of epitaxial palladium silicide contacts on single crystal silicon and diffused P-N diodes
  Solid-State Electronics, 1972