Methodology for Accurate Oxygen Distribution Analysis and Its Application to YBa2Cu3Ox Thin Films Using 16O(α, α)16O 3.045 MeV Resonance Reaction
- 1 October 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (10R)
- https://doi.org/10.1143/jjap.33.6039
Abstract
The enhancement factor of oxygen of 16O(α, α)16O resonance for a Rutherford backscattering cross section has been investigated using SiO2 films of various thicknesses. A new procedure to accurately extract the resonant oxygen height from a raw spectrum has been proposed. With this procedure, the dependence between the film thicknesses and resonant signals has been investigated, and was found to agree well with a computer simulation within experimental error. Using the enhancement factor, the depth dependence of oxygen concentration in the YBa2Cu3O x /MgO systems has been estimated accurately. Estimations of the accuracy of elastic backscattering analysis are also given.Keywords
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