Characterisation of a saddle field source for deposition of diamond-like carbon films
- 1 January 1996
- journal article
- Published by Elsevier in Ceramics International
- Vol. 22 (1) , 1-5
- https://doi.org/10.1016/0272-8842(95)00020-8
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- The optical and mechanical properties of carbon films grown using a fast atom beam sourceSurface and Coatings Technology, 1991
- Preparation and properties of diamondlike carbon filmsJournal of Vacuum Science & Technology A, 1989
- Atom beam sourceVacuum, 1984
- Characterization of the xenon ion flux produced by a saddle-field “neutral”-beam sourceInternational Journal of Mass Spectrometry and Ion Physics, 1982
- A saddle field ion source of spherical configuration for etching and thinning applicationsVacuum, 1974
- An improved form of the oscillating electron electrostatic ion source for ion etchingVacuum, 1974
- The ionic charge states produced by the oscillating electron electrostatic ion sourceJournal of Physics E: Scientific Instruments, 1974
- A double beam ion sourceVacuum, 1973
- Low-Pressure Ion SourceJournal of Vacuum Science and Technology, 1972