Fabrication of monolithic diffractive optical elements by the use of e-beam direct write on an analog resist and a single chemically assisted ion-beam-etching step
- 10 May 1995
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 34 (14) , 2534-2539
- https://doi.org/10.1364/ao.34.002534
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
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