Growth of Ga-face and N-face GaN films using ZnO Substrates
Open Access
- 1 January 1996
- journal article
- Published by Springer Nature in MRS Internet Journal of Nitride Semiconductor Research
Abstract
We have used plasma molecular beam epitaxy on (0 0 0 1) and (0 0 0 ) ZnO substrates to induce epitaxial growth of GaN of a known polarity. The polarity of the ZnO substrates can be easily and unambiguously determined by measuring the sign of the piezoelectric coefficient. If we assume that N-face GaN grows on O face ZnO and that Ga-face GaN grows on Zn face ZnO, then we can study the growth of both Ga and N faces. The most striking difference is the doping behavior of the two faces. Growth on the Ga-face is characterized by a higher carrier concentration and a lower threshold for Ga droplet formation.Keywords
This publication has 11 references indexed in Scilit:
- Determination of lattice polarity for growth of GaN bulk single crystals and epitaxial layersApplied Physics Letters, 1996
- ScAlMgO4: an Oxide Substrate for GaN EpitaxyMRS Internet Journal of Nitride Semiconductor Research, 1996
- Structural Defects in Heteroepitaxial and Homoepitaxial GaNMRS Proceedings, 1995
- Thermodynamic and kinetic processes involved in the growth of epitaxial GaN thin filmsApplied Physics Letters, 1993
- Wide-gap semiconductor InGaN and InGaAln grown by MOVPEJournal of Electronic Materials, 1992
- Structural Defects in GaN Epilayers Grown by Gas Source Molecular Beam EpitaxyMRS Proceedings, 1989
- Substrate-polarity dependence of metal-organic vapor-phase epitaxy-grown GaN on SiCJournal of Applied Physics, 1988
- The chemical preparation of gallium nitride layers at low temperaturesJournal of Materials Science, 1980
- Properties of Lithium‐Doped Hydrothermally Grown Single Crystals of Zinc OxideJournal of the American Ceramic Society, 1965
- Hydrothermal Growth of Large Sound Crystals of Zinc OxideJournal of the American Ceramic Society, 1964