Fabrication of epitaxial In2O3(ZnO)5 thin films by RF sputtering and their characterization by X-ray and electron diffraction techniques
- 6 December 2001
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 237-239, 558-563
- https://doi.org/10.1016/s0022-0248(01)01980-7
Abstract
No abstract availableKeywords
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