Dielektrische verluste von dünnen oberflächenoxidschichten auf silizium
- 31 May 1969
- journal article
- Published by Elsevier in Surface Science
- Vol. 15 (1) , 14-26
- https://doi.org/10.1016/0039-6028(69)90063-6
Abstract
No abstract availableKeywords
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