Tailored modeling: A way to the 'virtual microtransducer fab'?
- 1 March 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 47 (1-3) , 603-612
- https://doi.org/10.1016/0924-4247(94)00971-j
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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