Monte Carlo simulation of x-ray spectra in electron probe microanalysis: Comparison of continuum with experiment

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Abstract
A Monte Carlo simulation code has been developed to describe the x-ray generation in a specimen for electron probe microanalysis (EPMA), enabling x-ray spectra observed by EPMA to be reproduced theoretically. The Monte Carlo simulation is based on the use of the Mott cross section and Bethe stopping power equation in describing elastic and inelastic scattering processes, respectively. With respect to x-ray generation the Sommerfeld theory for bremsstrahlung radiation was described by equations of Kirkpatrick–Wiedmann and of Statham for bremsstrahlung cross section. The up-to-date compilation of mass absorption coefficient by Henke, Gullikson, and Davis [At. Data Nucl. Data Tables 54, 181 (1993)] is used to evaluate attenuation of x-ray intensity. To verify the present Monte Carlo simulation measurements of x-ray spectra for Cu and Rh targets have been performed for primary electron energies of 10–30 keV by energy-dispersive x-ray spectrometry of an electron probe microanalyzer. Excellent agreement between experimental spectra and calculated results has been confirmed in the cases investigated, leading to the conclusion that the Monte Carlo simulation technique will be a powerful tool for more comprehensive understanding of x-ray generation in EPMA specimens.