Copper CVD Precursors Containing Alkyl 3-Oxobutanoate Ligands
- 1 January 1996
- journal article
- research article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 8 (5) , 981-983
- https://doi.org/10.1021/cm950436r
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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