Fluids for Sensor Systems
- 9 November 1998
- book chapter
- Published by Springer Nature
- p. 163-188
- https://doi.org/10.1007/3-540-69544-3_7
Abstract
No abstract availableKeywords
This publication has 26 references indexed in Scilit:
- Fabrication of fluorinated polyimide microgrids using magnetically controlled reactive ion etching (MC-RIE) and their applications to an ion drag integrated micropumpJournal of Micromechanics and Microengineering, 1996
- Microflow devices and systemsJournal of Micromechanics and Microengineering, 1994
- LIGA micropump for gases and liquidsSensors and Actuators A: Physical, 1994
- Microfluidics-a reviewJournal of Micromechanics and Microengineering, 1993
- 3.5 mu m thin valves in titanium membranesJournal of Micromechanics and Microengineering, 1992
- A study of a high-pressure micropump for integrated chemical analysing systemsSensors and Actuators A: Physical, 1992
- Integrated smart two-dimensional thermal flow sensor with Seebeck-voltage-to-frequency conversionSensors and Actuators A: Physical, 1992
- Integrated micro flow control systemsSensors and Actuators A: Physical, 1990
- Micropump and sample-injector for integrated chemical analyzing systemsSensors and Actuators A: Physical, 1990
- Microfabricated electrohydrodynamic pumpsSensors and Actuators A: Physical, 1990