Dominant diffusing species during cobalt silicide formation

This publication has 16 references indexed in Scilit:

• Determination of the Diffusing Species and Diffusion Mechanism during CoSi , NiSi , and PtSi Formation by Using Radioactive Silicon as a Tracer
  Journal of the Electrochemical Society, 1989
• Thermodynamics, Kinetics and Interface Morphology of Reactions Between Metals and GaAs
  MRS Proceedings, 1989
• Point Defect Engineering Applied to Shallow Junction ULSI Processing
  MRS Proceedings, 1989
• Selectively enhanced silicide formation by a gold interlayer: Probing the dominant diffusing species and reaction mechanisms during thin-film reactions
  Applied Physics Letters, 1987
• Metallurgical aspects of the formation of silicides
  Thin Solid Films, 1986
• Formation of thin films of CoSi2: Nucleation and diffusion mechanisms
  Thin Solid Films, 1985
• Algorithms for the rapid simulation of Rutherford backscattering spectra
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
• CoSi2 growth: Kinetics, phase sequence and mechanism
  Materials Letters, 1985
• Growth of Co-Silicides from single crystal and evaporated Si
  Applied Physics A, 1985
• Marker Experiments for the moving Species in Silicides During Solid Phase Epitaxy of Evaporated Si
  MRS Proceedings, 1983