Micromachining of TiNi shape memory thin film for fabrication of micropump
- 1 February 2000
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 79 (3) , 251-259
- https://doi.org/10.1016/s0924-4247(99)00290-3
Abstract
No abstract availableFunding Information
- Ministry of Education, Culture, Sports, Science and Technology
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