Surface-micromachined resonant accelerometer
- 22 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 859-862
- https://doi.org/10.1109/sensor.1997.635237
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- An Inertial-Grade, Micromachined Vibrating Beam AccelerometerPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- CMOS micromechanical resonator oscillatorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Nonlinear mixing in surface-micromachined tuning fork oscillatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Surface micromachining: from vision to reality to vision [accelerometer]Published by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Embedded micromechanical devices for the monolithic integration of MEMS with CMOSPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Application of vibrating beam technology to digital acceleration measurementSensors and Actuators A: Physical, 1990
- Superflex: A Synergistic Combination of Vibrating Beam and Quartz Flexure Accelerometer TechnologyNAVIGATION: Journal of the Institute of Navigation, 1987