Patterning of cantilevers for power sensor microsystem
- 1 October 1998
- Vol. 51 (2) , 307-309
- https://doi.org/10.1016/s0042-207x(98)00181-x
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- The fabrication of thin GaAs cantilever beams for power sensor microsystem using RIEVacuum, 1996
- Monolithic GaAs MESFET power sensor microsystemElectronics Letters, 1995
- Silicon trench etching in a multi-frequency discharge reactorVacuum, 1994