Initial Stage of Film Growth of Pulsed Laser Deposited YMnO3
- 1 September 2000
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 39 (9S)
- https://doi.org/10.1143/jjap.39.5525
Abstract
To improve the polarization-electric field (P–E) characteristic of pulsed laser deposited YMnO3 film, the initial stage of the film growth was studied. We confirmed that an yttrium-rich layer with poor crystallinity was formed at the initial stage of film growth, and this resulted in the large orientation distribution of the films. Stoichiometric YMnO3 films without an yttrium-rich layer were successfully obtained by optimizing the laser power density, oxygen gas pressure, and use of ozone gas. Eventually, the P–E characteristic of the YMnO3 film was improved.Keywords
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