MBE Growth of Ga1-xInxAs Alloy on Si Substrate

Abstract
Ga1-x In x As ternary alloy layers were successfully grown on Si substrates by molecular beam epitaxy for the first time. Layer characterization by RHEED, X-ray diffraction and room temperature photoluminescence reveal that single domain Ga1-x In x As alloys which cover the 1.2∼1.6 µm wavelength region can be grown by a two-step growth method.