Design and fabrication of 10×10 micro-spatial light modulator array for phase and amplitude modulation
- 1 January 1999
- journal article
- conference paper
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 78 (1) , 63-70
- https://doi.org/10.1016/s0924-4247(99)00205-8
Abstract
No abstract availableKeywords
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