Megavolt Bioron and Arsenic Implantation into Silicon
- 1 January 1983
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- High energy ion implantation effects in siliconJournal of Applied Physics, 1983
- Megavolt arsenic implantation into siliconThin Solid Films, 1982
- A retrograde p-well for higher density CMOSIEEE Transactions on Electron Devices, 1981
- Ion-implanted FET for power applicationsIEEE Transactions on Electron Devices, 1974
- Electrical properties of silicon implanted with boron ions of MeV energyRadiation Effects, 1973
- Experimental Evaluation of High Energy Ion Implantation Gradients for Possible Fabrication of a Transistor Pedestal CollectorIBM Journal of Research and Development, 1971