The effect of the gold sputter-coated films in minimising damage in FIB-produced TEM specimens
- 11 October 2002
- journal article
- research article
- Published by Elsevier in Materials Letters
- Vol. 57 (15) , 2238-2241
- https://doi.org/10.1016/s0167-577x(02)01202-8
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Characterization of FIB Damage in SiliconMicroscopy and Microanalysis, 1999
- Transmission Electron Microscopy of Semiconductor Based ProductsMRS Proceedings, 1998
- A Detailed Procedure for Reliable Preparation of Tem Samples Using Fib MillingMRS Proceedings, 1997
- Fabrication of Planar and Cross-Sectional TEM Specimens Using a Focused Ion BeamMRS Proceedings, 1990