The crossover of preferred orientation in TiN film growth: A real time x-ray scattering study
- 31 January 1997
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 12 (1) , 9-12
- https://doi.org/10.1557/jmr.1997.0003
Abstract
The orientational crossover phenomena in a radio-frequency (rf) sputtering growth of TiN films were studied in a real-time synchrotron x-ray scattering experiment. Following the initial random nucleation and growth stage, the growth was dominated by the grains with the (002) planes aligned with the substrate surface. Surprisingly, at later stages, the grains with the (002) growth front tilted away from the surface by about 60° became dominant. The tilting of the growth front resulted in a faceted surface topology that was confirmed by an ex situ AFM study. Our x-ray results suggest that the crossover was driven by the competition between the surface and the strain energyKeywords
This publication has 9 references indexed in Scilit:
- Change of the critical thickness in the preferred orientation of TiN filmsJournal of Materials Research, 1995
- Effects of strain energy on the preferred orientation of TiN thin filmsJournal of Applied Physics, 1993
- Analysis of TiC and TiN films prepared by an arc-induced ion platingJournal of Vacuum Science & Technology A, 1991
- X-ray diffraction studies of physically vapour-deposited coatingsSurface and Coatings Technology, 1989
- Plasma-induced and plasma-assisted chemical vapour depositionThin Solid Films, 1985
- Structure and properties of TiN coatingsThin Solid Films, 1985
- Reactive high rate D.C. sputtering: Deposition rate, stoichiometry and features of TiOx and TiNx films with respect to the target modeThin Solid Films, 1984
- Crystal growth and orientations in vacuum-condensed silver films and their systematic dependance on the residual air pressure, film thickness, rate of deposition and substrate temperatureJournal of Physics D: Applied Physics, 1970
- Angle calculations for 3- and 4-circle X-ray and neutron diffractometersActa Crystallographica, 1967