PECVD silicon nitride diaphragms for condenser microphones
- 31 May 1991
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 4 (1-2) , 79-84
- https://doi.org/10.1016/0925-4005(91)80180-r
Abstract
No abstract availableKeywords
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