A scanning optical microscope for the inspection of semiconductor materials and devices
- 1 March 1980
- journal article
- Published by Wiley in Journal of Microscopy
- Vol. 118 (3) , 309-314
- https://doi.org/10.1111/j.1365-2818.1980.tb00278.x
Abstract
No abstract availableKeywords
This publication has 12 references indexed in Scilit:
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- Observation of carrier densities in silicon devices by infrared emissionJournal of Physics E: Scientific Instruments, 1977
- Reduction of grain boundary recombination in polycrystalline silicon solar cellsApplied Physics Letters, 1977
- Scanned Laser Infrared MicroscopeApplied Optics, 1970