Simple technique for fabricating limited couplergratings byholographic method using standard thick photoresist

25 May 1995

journal article
Published by Institution of Engineering and Technology (IET) in Electronics Letters

Vol. 31 (11) , 914-915
https://doi.org/10.1049/el:19950623

Abstract

The fabrication of photoresist gratings is considered. A solution to the problem of ‘transversal standing waves’ is given and appears simple and versatile.

Keywords

HOLOGRAPHIC METHOD
FABRICATION
TRANSVERSAL STANDING WAVES
LIMITED COUPLER GRATINGS
PHOTORESIST GRATINGS

This publication has 4 references indexed in Scilit:

Fabrication of submicrometre parallelogramic-shapedgratings in SiO ₂
Electronics Letters, 1994
Holographic lithography with thick photoresist
Applied Physics Letters, 1983
Photoresist gratings on reflecting surfaces
Journal of Applied Physics, 1982
Optical lithography
IEEE Transactions on Electron Devices, 1975