HBTs Using a-SiC and µc-Si
- 1 January 1992
- book chapter
- Published by Springer Nature in Springer Proceedings in Physics
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Characterization of Si Layers Deposited on (100) Si Substrates by Plasma CVD and Its Application to Si HBTsJapanese Journal of Applied Physics, 1989
- Present and Future Applications of Amorphous Silicon CarbidePublished by Springer Nature ,1989
- Microstructure of the a-Si1-xCx:H/c-Si InterfaceSpringer Proceedings in Physics, 1989