Ellipsometrische Bestimmung der Dicke und Brechzahl dünner Schichten auf Silizium
- 1 January 1969
- journal article
- research article
- Published by Wiley in Crystal Research and Technology
- Vol. 4 (1) , 149-160
- https://doi.org/10.1002/crat.19690040119
Abstract
No abstract availableKeywords
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