A controlled-force stylus displacement probe
- 1 October 1996
- journal article
- Published by Elsevier in Precision Engineering
- Vol. 19 (2-3) , 105-111
- https://doi.org/10.1016/s0141-6359(96)00008-6
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Improvement of the fidelity of surface measurement by active damping controlMeasurement Science and Technology, 1993
- Frictional forces between a diamond stylus and specimens at low loadWear, 1992
- Signal fidelity and tracking force in stylus profilometryInternational Journal of Machine Tools and Manufacture, 1992
- Force microscopy with a bidirectional capacitance sensorReview of Scientific Instruments, 1990
- Technology transfer in the development of a nano-topographic instrumentNanotechnology, 1990
- Sub-Nanometre Surface Texture and Profile Measurement with NANOSURF 2CIRP Annals, 1988
- Stylus profiling instrument for measuring statistical properties of smooth optical surfacesApplied Optics, 1981
- The design and some applications of sensitive capacitance micrometersJournal of Physics E: Scientific Instruments, 1973