Microstructure and electrical resistivity of TiN films deposited on heated and negatively biased silicon substrates
- 1 January 1994
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 237 (1-2) , 78-86
- https://doi.org/10.1016/0040-6090(94)90241-0
Abstract
No abstract availableThis publication has 43 references indexed in Scilit:
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