Spontaneous Pattern Formation on Ion Bombarded Si(001)
- 15 March 1999
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 82 (11) , 2330-2333
- https://doi.org/10.1103/physrevlett.82.2330
Abstract
Spectroscopic light scattering was used to monitor periodic ripple evolution on Si(001) in situ during sputtering. Analysis indicates that under high flux the concentration of mobile species on the surface is temperature and ion flux independent. This is due to an effect of ion collision cascades on the concentration of mobile species. We thereby measure the migration energy on the surface to be . The technique is generalizable to any material, including high temperature and insulating materials for which surface migration energies are notoriously difficult to measure.
Keywords
This publication has 22 references indexed in Scilit:
- The complex formation of ripples during depth profiling of Si with low energy, grazing oxygen beamsApplied Physics Letters, 1998
- Spectroscopic light scattering for real-time measurements of thin film and surface evolutionApplied Physics Letters, 1998
- X-Ray Scattering Study of the Surface Morphology of Au(111) duringIon IrradiationPhysical Review Letters, 1998
- Ion-induced effective surface diffusion in ion sputteringApplied Physics Letters, 1997
- Ripple Structure on Ag(110) Surface Induced by Ion SputteringPhysical Review Letters, 1997
- Dynamic Scaling of Ion-Sputtered SurfacesPhysical Review Letters, 1995
- Roughening instability and ion-induced viscous relaxation of SiO2 surfacesJournal of Applied Physics, 1994
- Roughening instability and evolution of the Ge(001) surface during ion sputteringPhysical Review Letters, 1994
- Theory of ripple topography induced by ion bombardmentJournal of Vacuum Science & Technology A, 1988
- The mechanisms of etch pit and ripple structure formation on ion bombarded Si and other amorphous solidsNuclear Instruments and Methods, 1980