The erosion energy efficiency of sputtering
- 1 January 1982
- Vol. 32 (8) , 509-512
- https://doi.org/10.1016/0042-207x(82)93801-5
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
- A novel anisotropic dry etching techniqueJournal of Vacuum Science and Technology, 1981
- Sputtering by ion bombardment theoretical conceptsPublished by Springer Nature ,1981
- An analytical formula and important parameters for low-energy ion sputteringJournal of Applied Physics, 1980
- Sputtering of single and multiple component materialsJournal of Vacuum Science and Technology, 1980
- The depth resolution of sputter profilingApplied Physics A, 1979
- Analytical modelling of sputter induced surface morphologyRadiation Effects, 1977
- The dependence of sputtering efficiency on ion energy and angle of incidenceRadiation Effects, 1971
- The sputtering efficiency of polycrystalline solidsRadiation Effects, 1970
- THE ENERGY EFFICIENCY OF LEAD SELF-SPUTTERINGApplied Physics Letters, 1968
- Sputtering efficiency of amorphous substancesCanadian Journal of Physics, 1968