Reactive sputtering of zirconium with oxygen
- 1 September 1976
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 37 (3) , L73-L75
- https://doi.org/10.1016/0040-6090(76)90596-4
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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