Ferroelectric PbTiO3 Thin Films Prepared by Multi-Ion-Beam Sputter and Ion-Assisted Deposition
- 1 July 1993
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 32 (7A) , L950
- https://doi.org/10.1143/jjap.32.l950
Abstract
Very thin PbTiO3 films of ∼350 Å were synthesized in situ on MgO substrates by multi-ion-beam sputter deposition using metal targets. Crystalline films in a perovskite phase were obtained at a low substrate temperature of 415°C by means of reactive sputtering in an oxygen ambient. The formation of crystal phases was studied as a function of deposition parameters, and ion-beam-assisted deposition using an electron cyclotron resonance (ECR) plasma was also employed to improve the film growth. Low-energy (c-axis orientation and crystallization at a lower substrate temperature of 400°C.Keywords
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