Sensor Packaging
- 1 January 1990
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Absolute pressure sensors by air-tight electrical feedthrough structureSensors and Actuators A: Physical, 1990
- Low-temperature silicon-to-silicon anodic bonding with intermediate low melting point glanSensors and Actuators A: Physical, 1990
- Normally closed microvalve and mircopump fabricated on a silicon waferSensors and Actuators, 1989
- Fabrication of catheter-tip and sidewall miniature pressure sensorsIEEE Transactions on Electron Devices, 1982
- Methods of isfet fabricationSensors and Actuators, 1981