Monolithic InP-biased tunable filter with 10-nm bandwidth for optical data interconnects in the 1550-nm band
- 1 May 1999
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 11 (5) , 584-586
- https://doi.org/10.1109/68.759406
Abstract
We report the design and fabrication of micromechanically tunable filters with a 10-nm bandwidth for the 1550-nm wavelength range. The electrostatic actuation provides a tuning range of 30 nm and a low actuation power. The filters consist of a monolithic, vertical Fabry-Perot resonant cavity based on an epitaxial InGaAsP-InP Bragg reflector. An actuable InP micromechanical structure suspended over a 1/spl times/-thick air-gap provides for the tuning of the cavity. Our design aims primarily for a device that is simple, robust and that can be integrated with an InP-based photodetector or emitter in a low-cost component for optical data interconnects.Keywords
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