Line-addressable torsional micromirrors for light modulator arrays
- 1 April 1994
- journal article
- research article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 41 (1-3) , 324-329
- https://doi.org/10.1016/0924-4247(94)80131-2
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
- Dynamical model of microscale electromechanical spatial light modulatorJournal of Applied Physics, 1993
- Surface micromachined scanning mirrorsMicroelectronic Engineering, 1992
- Deformable grating optical modulatorOptics Letters, 1992
- Biaxial scanning mirror activated by bimorph structures for medical applicationsSensors and Actuators A: Physical, 1992
- Link analysis of a deformable mirror device based optical crossbar switchOptical Engineering, 1992
- Investigations on free-standing polysilicon beams in view of their application as transducersSensors and Actuators A: Physical, 1990
- A silicon light modulatorJournal of Physics E: Scientific Instruments, 1988
- Micromechanical light modulator array fabricated on siliconApplied Physics Letters, 1977
- TELEVISION A New Schlieren Light Valve for Television ProjectionApplied Optics, 1970
- Miniaturization of Tuning ForksScience, 1968