Low-power micro gas sensor
- 1 July 1996
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 33 (1-3) , 147-150
- https://doi.org/10.1016/0925-4005(96)01822-9
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Tin oxide microsensor for LPG monitoringSensors and Actuators B: Chemical, 1994
- Preparation of polycrystalline SiC films for sensors used at high temperatureSensors and Actuators A: Physical, 1994
- A new SnO2 low temperature deposition technique for integrated gas sensorsSensors and Actuators B: Chemical, 1993
- Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processingIEEE Electron Device Letters, 1993
- A substrate for thin-film gas sensors in microelectronic technologySensors and Actuators B: Chemical, 1990
- Integrated hydrogen leak detector with a tunnel mis structureSensors and Actuators, 1988