Kinetics of Silicon Nitride Chemical Vapor Deposition from Silicon Tetrafluoride and Ammonia
- 1 August 1993
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 76 (8) , 1930-1936
- https://doi.org/10.1111/j.1151-2916.1993.tb08314.x
Abstract
No abstract availableKeywords
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