The formation of conductive films on polyimide by ion-beam-induced decomposition of metal compounds
- 1 March 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 7-8, 481-486
- https://doi.org/10.1016/0168-583x(85)90417-3
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Zur Strukturchemie der Halogenide der PlatinmetallePublished by Springer Nature ,2006
- Optical and electrical properties of ion-beam-irradiated films of organic molecular solids and polymersJournal of Applied Physics, 1984
- Metal deposition for microelectronic applications studied by RBS techniqueNuclear Instruments and Methods in Physics Research, 1983
- Ion-beam-induced conductivity in polymer filmsJournal of Applied Physics, 1983
- Ionic decomposition of platinum chloridesNuclear Instruments and Methods in Physics Research, 1983
- Large conductivity changes in ion beam irradiated organic thin filmsApplied Physics Letters, 1982
- Phase changes in insulators produced by particle bombardmentNuclear Instruments and Methods, 1981
- Thermal effects in sputteringSurface Science, 1979
- Change in stoichiometry of thin films of palladium chloride during ion beam analysisNuclear Instruments and Methods, 1978
- 1.13 Plating with ion acceleratorsVacuum, 1977