Phase equilibria in metal-gallium-arsenic systems: Thermodynamic considerations for metallization materials
- 15 March 1987
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 61 (6) , 2195-2202
- https://doi.org/10.1063/1.337980
Abstract
We propose a classification scheme for phase equilibria in elemental metal-gallium-arsenic systems. Using available data we assign as many metals as possible to seven generic types of ternary phase diagrams. We describe how the phase diagrams can provide a framework for interpreting previous studies of metal reactions with GaAs substrates and for identifying stable materials for GaAs metallizations.This publication has 71 references indexed in Scilit:
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