Chemical heterogeneity in off stoichiometry a-SixNyHz from a collective vibrational modes study

This publication has 6 references indexed in Scilit:

• The structure of plasma-deposited silicon nitride films determined by infrared spectroscopy
  Journal of Applied Physics, 1985
• Annealing and crystallization processes in tetrahedrally bonded binary amorphous semiconductors
  Philosophical Magazine Part B, 1984
• Nitrogen-bonding environments in glow-discharge—depositeda−Si:Hfilms
  Physical Review B, 1983
• Vibrational absorption bands for implanted nitrogen in crystalline silicon
  Applied Physics Letters, 1983
• Wide Optical-Gap, Photoconductive a-Si_xN_1-x:H
  Japanese Journal of Applied Physics, 1981
• Raman and IR absorption spectroscopic studies on α, β, and amorphous Si3N4
  Journal of Non-Crystalline Solids, 1981