Ultralow biased widely continuously tunable fabry-Perot filter
- 28 February 2003
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 15 (3) , 434-436
- https://doi.org/10.1109/lpt.2002.807908
Abstract
Optical filters capable of single control parameter-based wide tuning are implemented and studied. The surface micromachined Fabry-Perot filter consists of two InP-air-gap distributed Bragg reflectors and shows a wavelength tuning of more than 140 nm using only a single voltage of up to 3.2 V at currents below 0.2 mA. The membrane-based filter is designed to block all wavelengths in the whole range of 1250-1800 nm apart from its transmission wavelength.Keywords
This publication has 13 references indexed in Scilit:
- Investigations of growth conditions for InP suited for micro opto electro mechanical systems for data communicationPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Continuously tunable air gap micro-cavity devices for optical communication systemsPublished by SPIE-Intl Soc Optical Eng ,2002
- Widely tunable torsional optical filterIEEE Photonics Technology Letters, 2002
- Potential for micromachined actuation of ultra-wide continuously tunable optoelectronic devicesApplied Physics B Laser and Optics, 2002
- III–V semiconductor material for tunable Fabry–Perot filters for coarse and dense WDM systemsSensors and Actuators A: Physical, 2000
- Mechanical considerations in the design of a micromechanical tuneable InP-based WDM filterJournal of Microelectromechanical Systems, 1999
- Fabrication of Tunable InP/Air-gap Fabry-Perot Cavities by Selective Etching of InGaAs Sacrificial LayersPhysica Scripta, 1999
- Widely tunable Fabry-Perot filter using Ga(Al)As-AlOx deformable mirrorsIEEE Photonics Technology Letters, 1998
- Long resonator micromachined tunable GaAs-AlAs Fabry-Perot filterIEEE Photonics Technology Letters, 1997
- High-sensitivity surface micromachined structures for internal stress and stress gradient evaluationJournal of Micromechanics and Microengineering, 1997