AES microstructural investigations of low-temperature, low-frequency plasma-deposited a-SixC1−x:H films
- 1 April 1993
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 64 (4) , 345-351
- https://doi.org/10.1016/0169-4332(93)90204-o
Abstract
No abstract availableKeywords
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