Alkoxide precursors for controlled oxygen incorporation during metalorganic vapor phase epitaxy GaAs and AlxGa1−xAs growth
- 1 July 1994
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 23 (7) , 659-667
- https://doi.org/10.1007/bf02653353
Abstract
No abstract availableKeywords
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