Damage production and arsenic displacement in silicon by proton and helium irradiation
- 1 February 1976
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 132, 285-291
- https://doi.org/10.1016/0029-554x(76)90747-3
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Silicon surface studies by means of proton backscattering and proton induced X-Ray emissionRadiation Effects, 1973
- Channeling measurements in As-doped SiJournal of Applied Physics, 1972
- Depth Profiles of the Lattice Disorder Resulting from Ion Bombardment of Silicon Single CrystalsJournal of Applied Physics, 1970
- The Displacement of Atoms in Solids by RadiationReports on Progress in Physics, 1955