Focused high energy proton beam micromachining: A perspective view
- 1 September 1999
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 158 (1-4) , 165-172
- https://doi.org/10.1016/s0168-583x(99)00513-3
Abstract
No abstract availableKeywords
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